Jingyi Wu, Hongyu Yu, Yang Jiang, Zeyu Wan, Siqi Lei, Wei-Chih Cheng, Guangnan Zhou, Robert Sokolovskij, Qing Wang, Guangrui Maggie Xia. Oxygen-plasma-based digital etching for GaN/AlGaN high electron mobility transistors. In 13th IEEE International Conference on ASIC, ASICON 2019, Chongqing, China, October 29 - November 1, 2019. pages 1-4, IEEE, 2019. [doi]
Abstract is missing.