A Petri-Net-Based Scheduling Strategy for Dual-Arm Cluster Tools With Wafer Revisiting

Naiqi Wu, MengChu Zhou, Feng Chu, Chengbin Chu. A Petri-Net-Based Scheduling Strategy for Dual-Arm Cluster Tools With Wafer Revisiting. IEEE Transactions on Systems, Man, and Cybernetics, Part A, 43(5):1182-1194, 2013. [doi]

@article{WuZCC13,
  title = {A Petri-Net-Based Scheduling Strategy for Dual-Arm Cluster Tools With Wafer Revisiting},
  author = {Naiqi Wu and MengChu Zhou and Feng Chu and Chengbin Chu},
  year = {2013},
  doi = {10.1109/TSMCA.2012.2230440},
  url = {http://dx.doi.org/10.1109/TSMCA.2012.2230440},
  researchr = {https://researchr.org/publication/WuZCC13},
  cites = {0},
  citedby = {0},
  journal = {IEEE Transactions on Systems, Man, and Cybernetics, Part A},
  volume = {43},
  number = {5},
  pages = {1182-1194},
}