A Petri-Net-Based Scheduling Strategy for Dual-Arm Cluster Tools With Wafer Revisiting

Naiqi Wu, MengChu Zhou, Feng Chu, Chengbin Chu. A Petri-Net-Based Scheduling Strategy for Dual-Arm Cluster Tools With Wafer Revisiting. IEEE Transactions on Systems, Man, and Cybernetics, Part A, 43(5):1182-1194, 2013. [doi]

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