A Petri-Net-Based Scheduling Strategy for Dual-Arm Cluster Tools With Wafer Revisiting

Naiqi Wu, MengChu Zhou, Feng Chu, Chengbin Chu. A Petri-Net-Based Scheduling Strategy for Dual-Arm Cluster Tools With Wafer Revisiting. IEEE Transactions on Systems, Man, and Cybernetics, Part A, 43(5):1182-1194, 2013. [doi]

Abstract

Abstract is missing.