A novel narrowband MEMS filter with extensional mode resonators

Zeyu Wu, Junyuan Zhao, Wei Wang, Bo Niu, Botao Liu, Yawei Wang, Yinfang Zhu, Weibin Cui, Jinling Yang. A novel narrowband MEMS filter with extensional mode resonators. Microelectronics Journal, 152:106393, 2024. [doi]

Authors

Zeyu Wu

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Junyuan Zhao

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Wei Wang

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Bo Niu

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Botao Liu

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Yawei Wang

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Yinfang Zhu

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Weibin Cui

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Jinling Yang

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