A novel narrowband MEMS filter with extensional mode resonators

Zeyu Wu, Junyuan Zhao, Wei Wang, Bo Niu, Botao Liu, Yawei Wang, Yinfang Zhu, Weibin Cui, Jinling Yang. A novel narrowband MEMS filter with extensional mode resonators. Microelectronics Journal, 152:106393, 2024. [doi]

Abstract

Abstract is missing.