Time Series Forecasting in a CVD Reactor for Polysilicon Production

Bangwen Xi, Gang Xiong 0001, Jun Yan, Zhen Shen, Yonggang Song, Xiong Liu, Sheng Liu. Time Series Forecasting in a CVD Reactor for Polysilicon Production. In 17th IEEE International Conference on Automation Science and Engineering, CASE 2021, Lyon, France, August 23-27, 2021. pages 1503-1508, IEEE, 2021. [doi]

@inproceedings{XiXYSSLL21,
  title = {Time Series Forecasting in a CVD Reactor for Polysilicon Production},
  author = {Bangwen Xi and Gang Xiong 0001 and Jun Yan and Zhen Shen and Yonggang Song and Xiong Liu and Sheng Liu},
  year = {2021},
  doi = {10.1109/CASE49439.2021.9551462},
  url = {https://doi.org/10.1109/CASE49439.2021.9551462},
  researchr = {https://researchr.org/publication/XiXYSSLL21},
  cites = {0},
  citedby = {0},
  pages = {1503-1508},
  booktitle = {17th IEEE International Conference on Automation Science and Engineering, CASE 2021, Lyon, France, August 23-27, 2021},
  publisher = {IEEE},
  isbn = {978-1-6654-1873-7},
}