Bangwen Xi, Gang Xiong 0001, Jun Yan, Zhen Shen, Yonggang Song, Xiong Liu, Sheng Liu. Time Series Forecasting in a CVD Reactor for Polysilicon Production. In 17th IEEE International Conference on Automation Science and Engineering, CASE 2021, Lyon, France, August 23-27, 2021. pages 1503-1508, IEEE, 2021. [doi]
Abstract is missing.