A digital prototype miniature silicon microgyroscope

Dunzhu Xia, Xia Sheng, Shourong Wang. A digital prototype miniature silicon microgyroscope. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 429-432, IEEE, 2010. [doi]

Authors

Dunzhu Xia

This author has not been identified. Look up 'Dunzhu Xia' in Google

Xia Sheng

This author has not been identified. Look up 'Xia Sheng' in Google

Shourong Wang

This author has not been identified. Look up 'Shourong Wang' in Google