A digital prototype miniature silicon microgyroscope

Dunzhu Xia, Xia Sheng, Shourong Wang. A digital prototype miniature silicon microgyroscope. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 429-432, IEEE, 2010. [doi]

Abstract

Abstract is missing.