A digital prototype miniature silicon microgyroscope

Dunzhu Xia, Xia Sheng, Shourong Wang. A digital prototype miniature silicon microgyroscope. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 429-432, IEEE, 2010. [doi]

@inproceedings{XiaSW10,
  title = {A digital prototype miniature silicon microgyroscope},
  author = {Dunzhu Xia and Xia Sheng and Shourong Wang},
  year = {2010},
  doi = {10.1109/NEMS.2010.5592425},
  url = {http://dx.doi.org/10.1109/NEMS.2010.5592425},
  researchr = {https://researchr.org/publication/XiaSW10},
  cites = {0},
  citedby = {0},
  pages = {429-432},
  booktitle = {5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010},
  publisher = {IEEE},
}