Design and Control of a Multi-actuated High-bandwidth and Large-range Scanner for Atomic Force Microscopy

F. Xia, S. Truncale, Y. Wang, Kamal Youcef-Toumi. Design and Control of a Multi-actuated High-bandwidth and Large-range Scanner for Atomic Force Microscopy. In 2018 Annual American Control Conference, ACC 2018, Milwaukee, WI, USA, June 27-29, 2018. pages 4330-4335, IEEE, 2018. [doi]

Authors

F. Xia

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S. Truncale

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Y. Wang

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Kamal Youcef-Toumi

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