Design and Control of a Multi-actuated High-bandwidth and Large-range Scanner for Atomic Force Microscopy

F. Xia, S. Truncale, Y. Wang, Kamal Youcef-Toumi. Design and Control of a Multi-actuated High-bandwidth and Large-range Scanner for Atomic Force Microscopy. In 2018 Annual American Control Conference, ACC 2018, Milwaukee, WI, USA, June 27-29, 2018. pages 4330-4335, IEEE, 2018. [doi]

Abstract

Abstract is missing.