Qijun Xiao, Wenyuan Chen, Gaoyin Ma, Feng Cui, Shengyong Li, Weiping Zhang. Simulation of levitation control for a micromachined electrostatically levitated gyroscope. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 160-163, IEEE, 2009. [doi]
Abstract is missing.