Layout optimization and template pattern verification for directed self-assembly (DSA)

Zigang Xiao, Daifeng Guo, Martin D. F. Wong, He Yi, Maryann C. Tung, H.-S. Philip Wong. Layout optimization and template pattern verification for directed self-assembly (DSA). In Proceedings of the 52nd Annual Design Automation Conference, San Francisco, CA, USA, June 7-11, 2015. pages 199, ACM, 2015. [doi]

Abstract

Abstract is missing.