Contact layer decomposition to enable DSA with multi-patterning technique for standard cell based layout - researchr publication authors

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Zigang Xiao, Chun-Xun Lin, Martin D. F. Wong, Hongbo Zhang. Contact layer decomposition to enable DSA with multi-patterning technique for standard cell based layout. In 21st Asia and South Pacific Design Automation Conference, ASP-DAC 2016, Macao, Macao, January 25-28, 2016. pages 95-102, IEEE, 2016. [doi]

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