Zigang Xiao, Chun-Xun Lin, Martin D. F. Wong, Hongbo Zhang. Contact layer decomposition to enable DSA with multi-patterning technique for standard cell based layout. In 21st Asia and South Pacific Design Automation Conference, ASP-DAC 2016, Macao, Macao, January 25-28, 2016. pages 95-102, IEEE, 2016. [doi]
@inproceedings{XiaoLWZ16,
title = {Contact layer decomposition to enable DSA with multi-patterning technique for standard cell based layout},
author = {Zigang Xiao and Chun-Xun Lin and Martin D. F. Wong and Hongbo Zhang},
year = {2016},
doi = {10.1109/ASPDAC.2016.7427995},
url = {http://dx.doi.org/10.1109/ASPDAC.2016.7427995},
researchr = {https://researchr.org/publication/XiaoLWZ16},
cites = {0},
citedby = {0},
pages = {95-102},
booktitle = {21st Asia and South Pacific Design Automation Conference, ASP-DAC 2016, Macao, Macao, January 25-28, 2016},
publisher = {IEEE},
isbn = {978-1-4673-9569-4},
}