Low-Cost Lithography Hotspot Detection with Active Entropy Sampling and Model Calibration

Yifeng Xiao, Miaodi Su, Haoyu Yang, Jianli Chen, Jun Yu, Bei Yu 0001. Low-Cost Lithography Hotspot Detection with Active Entropy Sampling and Model Calibration. In 58th ACM/IEEE Design Automation Conference, DAC 2021, San Francisco, CA, USA, December 5-9, 2021. pages 907-912, IEEE, 2021. [doi]

Authors

Yifeng Xiao

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Miaodi Su

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Haoyu Yang

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Jianli Chen

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Jun Yu

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Bei Yu 0001

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