Ziwen Xiao, Zhiming Yang, Yang Yu 0015. An ILD Void Detection Method for Monolithic 3-D ICs Based on Switched Capacitors. IEEE Trans. on CAD of Integrated Circuits and Systems, 42(8):2728-2737, 2023. [doi]
@article{XiaoY023,
title = {An ILD Void Detection Method for Monolithic 3-D ICs Based on Switched Capacitors},
author = {Ziwen Xiao and Zhiming Yang and Yang Yu 0015},
year = {2023},
doi = {10.1109/TCAD.2022.3226318},
url = {https://doi.org/10.1109/TCAD.2022.3226318},
researchr = {https://researchr.org/publication/XiaoY023},
cites = {0},
citedby = {0},
journal = {IEEE Trans. on CAD of Integrated Circuits and Systems},
volume = {42},
number = {8},
pages = {2728-2737},
}