An ILD Void Detection Method for Monolithic 3-D ICs Based on Switched Capacitors

Ziwen Xiao, Zhiming Yang, Yang Yu 0015. An ILD Void Detection Method for Monolithic 3-D ICs Based on Switched Capacitors. IEEE Trans. on CAD of Integrated Circuits and Systems, 42(8):2728-2737, 2023. [doi]

Abstract

Abstract is missing.