Jianbing Xie, Weizheng Yuan, Honglong Chang. A novel method for the manufacture of MEMS devices with large exposed area based on SOI wafers. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 253-256, IEEE, 2009. [doi]
Abstract is missing.