Combination of LPCVD and PECVD SiC in fabricating evanescent waveguides - researchr publication authors

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Yu Xin, Gregory Pandraud, Lukasz S. Pakula, Bruno Morana, Paddy J. French. Combination of LPCVD and PECVD SiC in fabricating evanescent waveguides. In 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016. pages 549-552, IEEE, 2016. [doi]

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