Combination of LPCVD and PECVD SiC in fabricating evanescent waveguides

Yu Xin, Gregory Pandraud, Lukasz S. Pakula, Bruno Morana, Paddy J. French. Combination of LPCVD and PECVD SiC in fabricating evanescent waveguides. In 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016. pages 549-552, IEEE, 2016. [doi]

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