Yu Xin, Gregory Pandraud, Lukasz S. Pakula, Bruno Morana, Paddy J. French. Combination of LPCVD and PECVD SiC in fabricating evanescent waveguides. In 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016. pages 549-552, IEEE, 2016. [doi]
@inproceedings{XinPPMF16,
title = {Combination of LPCVD and PECVD SiC in fabricating evanescent waveguides},
author = {Yu Xin and Gregory Pandraud and Lukasz S. Pakula and Bruno Morana and Paddy J. French},
year = {2016},
doi = {10.1109/NEMS.2016.7758311},
url = {https://doi.org/10.1109/NEMS.2016.7758311},
researchr = {https://researchr.org/publication/XinPPMF16},
cites = {0},
citedby = {0},
pages = {549-552},
booktitle = {11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016},
publisher = {IEEE},
isbn = {978-1-5090-1947-2},
}