Surface acoustic wave linear motor for two-dimensional optical positioning system

Yumei Xing, Yigui Li, Junfeng Zhang, Gaoyang Gao. Surface acoustic wave linear motor for two-dimensional optical positioning system. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 555-558, IEEE, 2009. [doi]

Abstract

Abstract is missing.