Moving horizon estimation for in situ monitoring of chemical vapor deposition process

Rentian Xiong, Martha A. Gallivan. Moving horizon estimation for in situ monitoring of chemical vapor deposition process. In American Control Conference, ACC 2007, New York, NY, USA, 9-13 July, 2007. pages 3648-3653, IEEE, 2007. [doi]

Authors

Rentian Xiong

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Martha A. Gallivan

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