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Rentian Xiong, Martha A. Gallivan. Moving horizon estimation for in situ monitoring of chemical vapor deposition process. In American Control Conference, ACC 2007, New York, NY, USA, 9-13 July, 2007. pages 3648-3653, IEEE, 2007. [doi]
Possibly Related PublicationsThe following publications are possibly variants of this publication: In Situ Sensing of a Chemical Vapor Deposition ProcessMartha A. Grover, Rentian Xiong. tcst, 17(5):1228-1235, 2009. [doi]
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