A Dual-Mode Built-In Self-Test Technique for Capacitive MEMS Devices

Xingguo Xiong, Yu-Liang Wu, Wen-Ben Jone. A Dual-Mode Built-In Self-Test Technique for Capacitive MEMS Devices. In 22nd IEEE VLSI Test Symposium (VTS 2004), 25-29 April 2004, Napa Valley, CA, USA. pages 148-153, IEEE Computer Society, 2004. [doi]

@inproceedings{XiongWJ04,
  title = {A Dual-Mode Built-In Self-Test Technique for Capacitive MEMS Devices},
  author = {Xingguo Xiong and Yu-Liang Wu and Wen-Ben Jone},
  year = {2004},
  url = {http://csdl.computer.org/comp/proceedings/vts/2004/2134/00/21340148abs.htm},
  tags = {testing},
  researchr = {https://researchr.org/publication/XiongWJ04},
  cites = {0},
  citedby = {0},
  pages = {148-153},
  booktitle = {22nd IEEE VLSI Test Symposium (VTS 2004), 25-29 April 2004, Napa Valley, CA, USA},
  publisher = {IEEE Computer Society},
  isbn = {0-7695-2134-7},
}