Xingguo Xiong, Yu-Liang Wu, Wen-Ben Jone. A Dual-Mode Built-In Self-Test Technique for Capacitive MEMS Devices. In 22nd IEEE VLSI Test Symposium (VTS 2004), 25-29 April 2004, Napa Valley, CA, USA. pages 148-153, IEEE Computer Society, 2004. [doi]
Abstract is missing.