Influence of sidewall spacer on threshold voltage of MOSFET with high-k gate dielectric

J. P. Xu, F. Ji, P. T. Lai, J. G. Guan. Influence of sidewall spacer on threshold voltage of MOSFET with high-k gate dielectric. Microelectronics Reliability, 48(2):181-186, 2008. [doi]

Abstract

Abstract is missing.