Wei Xu, Zhijuan Li, Zetao Fang, Bo Wang 0012, Linze Hong, Gai Yang, Su-Ting Han, Xiaojin Zhao, Xiaoyi Wang. A Sub-5mW Monolithic CMOS-MEMS Thermal Flow Sensing SoC With ±6 m/s Linear Range. J. Solid-State Circuits, 59(5):1486-1496, May 2024. [doi]
Abstract is missing.