Determination of Thermal Conductivities for Thin-Film Materials in CMOS MEMS Process - researchr publication authors

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Wei Xu, Xiaoyi Wang, Xiaojin Zhao, Yatao Yang, Yi-Kuen Lee. Determination of Thermal Conductivities for Thin-Film Materials in CMOS MEMS Process. IEEE T. Instrumentation and Measurement, 70:1-9, 2021. [doi]

This author has not been identified. Look up 'Wei Xu' in GoogleThis author has not been identified. Look up 'Xiaoyi Wang' in GoogleThis author has not been identified. Look up 'Xiaojin Zhao' in GoogleThis author has not been identified. Look up 'Yatao Yang' in GoogleThis author has not been identified. Look up 'Yi-Kuen Lee' in Google

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