Wei Xu, Xiaoyi Wang, Xiaojin Zhao, Yatao Yang, Yi-Kuen Lee. Determination of Thermal Conductivities for Thin-Film Materials in CMOS MEMS Process. IEEE T. Instrumentation and Measurement, 70:1-9, 2021. [doi]
@article{XuWZYL21,
title = {Determination of Thermal Conductivities for Thin-Film Materials in CMOS MEMS Process},
author = {Wei Xu and Xiaoyi Wang and Xiaojin Zhao and Yatao Yang and Yi-Kuen Lee},
year = {2021},
doi = {10.1109/TIM.2020.3029361},
url = {https://doi.org/10.1109/TIM.2020.3029361},
researchr = {https://researchr.org/publication/XuWZYL21},
cites = {0},
citedby = {0},
journal = {IEEE T. Instrumentation and Measurement},
volume = {70},
pages = {1-9},
}