Determination of Thermal Conductivities for Thin-Film Materials in CMOS MEMS Process

Wei Xu, Xiaoyi Wang, Xiaojin Zhao, Yatao Yang, Yi-Kuen Lee. Determination of Thermal Conductivities for Thin-Film Materials in CMOS MEMS Process. IEEE T. Instrumentation and Measurement, 70:1-9, 2021. [doi]

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