Hybrid etching process and its application in thermopile infrared sensor - researchr publication authors

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Dehui Xu, Bin Xiong, Yuelin Wang, Yinglei Ma. Hybrid etching process and its application in thermopile infrared sensor. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 425-428, IEEE, 2010. [doi]

This author has not been identified. Look up 'Dehui Xu' in GoogleThis author has not been identified. Look up 'Bin Xiong' in GoogleThis author has not been identified. Look up 'Yuelin Wang' in GoogleThis author has not been identified. Look up 'Yinglei Ma' in Google

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