Dehui Xu, Bin Xiong, Yuelin Wang, Yinglei Ma. Hybrid etching process and its application in thermopile infrared sensor. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 425-428, IEEE, 2010. [doi]
Abstract is missing.