Dehui Xu, Bin Xiong, Yuelin Wang, Yinglei Ma. Hybrid etching process and its application in thermopile infrared sensor. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 425-428, IEEE, 2010. [doi]
@inproceedings{XuXWM10, title = {Hybrid etching process and its application in thermopile infrared sensor}, author = {Dehui Xu and Bin Xiong and Yuelin Wang and Yinglei Ma}, year = {2010}, doi = {10.1109/NEMS.2010.5592424}, url = {http://dx.doi.org/10.1109/NEMS.2010.5592424}, researchr = {https://researchr.org/publication/XuXWM10}, cites = {0}, citedby = {0}, pages = {425-428}, booktitle = {5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010}, publisher = {IEEE}, }