3D Integrated Pixel Sensor with Silicon-on-Insulator Technology for the International Linear Collider Experiment

Miho Yamada, Shun Ono, Yasuo Arai, Ikuo Kurachi, Toru Tsuboyama, Masayuki Ikebe, Makoto Motoyoshi. 3D Integrated Pixel Sensor with Silicon-on-Insulator Technology for the International Linear Collider Experiment. In 2019 International 3D Systems Integration Conference (3DIC), Sendai, Japan, October 8-10, 2019. pages 1-4, IEEE, 2019. [doi]

Abstract

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