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Exhaustive and Systematic Accuracy Verification and Enhancement of STI Stress Compact Model for General Realistic Layout Patterns

Kenta Yamada, Toshiyuki Syo, Hisao Yoshimura, Masaru Ito, Tatsuya Kunikiyo, Toshiki Kanamoto, Shigetaka Kumashiro. Exhaustive and Systematic Accuracy Verification and Enhancement of STI Stress Compact Model for General Realistic Layout Patterns. IEICE Transactions, 93-C(8):1349-1358, 2010. [doi]

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