Copper-filled anodized aluminum oxide a potential material for chip to chip bonding

Kosuke Yamashita, Shunji Kurooka, Koji Shirakawa, Yoshinori Hotta, Hirofumi Abe. Copper-filled anodized aluminum oxide a potential material for chip to chip bonding. In 2015 International 3D Systems Integration Conference, 3DIC 2015, Sendai, Japan, August 31 - September 2, 2015. IEEE, 2015. [doi]

Authors

Kosuke Yamashita

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Shunji Kurooka

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Koji Shirakawa

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Yoshinori Hotta

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Hirofumi Abe

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