Electrical Properties of Each Channels in Vertical Stacked Gate-All-Around Nanosheet s-Si pMOSFETs

Jing Yan, Junkang Li, Rui Zhang. Electrical Properties of Each Channels in Vertical Stacked Gate-All-Around Nanosheet s-Si pMOSFETs. In International Conference on IC Design and Technology, ICICDT 2023, Tokyo, Japan, September 25-28, 2023. pages 159-162, IEEE, 2023. [doi]

Authors

Jing Yan

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Junkang Li

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Rui Zhang

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