A control approach to high-speed probe-based nanofabrication

Yan Yan, Qingze Zou, Zhiqun Lin. A control approach to high-speed probe-based nanofabrication. In American Control Conference, ACC 2009. St. Louis, Missouri, USA, June 10-12, 2009. pages 295-300, IEEE, 2009. [doi]

Abstract

Abstract is missing.