Design and optimization of an integrated MEMS gas chamber with high transmissivity - researchr publication authors

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Jing Yang, Yuhua Cheng, Yupeng Yuan, Xiaofei Li, Zuwei Zhang, Ming Xu, Dengpan Wang, Jiangdong Mu, Yong Mei, Yuzhe Zhang. Design and optimization of an integrated MEMS gas chamber with high transmissivity. Digit. Commun. Networks, 7(1):82-91, 2021. [doi]

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