Design and optimization of an integrated MEMS gas chamber with high transmissivity

Jing Yang, Yuhua Cheng, Yupeng Yuan, Xiaofei Li, Zuwei Zhang, Ming Xu, Dengpan Wang, Jiangdong Mu, Yong Mei, Yuzhe Zhang. Design and optimization of an integrated MEMS gas chamber with high transmissivity. Digit. Commun. Networks, 7(1):82-91, 2021. [doi]

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