Design and optimization of an integrated MEMS gas chamber with high transmissivity

Jing Yang, Yuhua Cheng, Yupeng Yuan, Xiaofei Li, Zuwei Zhang, Ming Xu, Dengpan Wang, Jiangdong Mu, Yong Mei, Yuzhe Zhang. Design and optimization of an integrated MEMS gas chamber with high transmissivity. Digit. Commun. Networks, 7(1):82-91, 2021. [doi]

@article{YangCYLZXWMMZ21,
  title = {Design and optimization of an integrated MEMS gas chamber with high transmissivity},
  author = {Jing Yang and Yuhua Cheng and Yupeng Yuan and Xiaofei Li and Zuwei Zhang and Ming Xu and Dengpan Wang and Jiangdong Mu and Yong Mei and Yuzhe Zhang},
  year = {2021},
  doi = {10.1016/j.dcan.2020.05.006},
  url = {https://doi.org/10.1016/j.dcan.2020.05.006},
  researchr = {https://researchr.org/publication/YangCYLZXWMMZ21},
  cites = {0},
  citedby = {0},
  journal = {Digit. Commun. Networks},
  volume = {7},
  number = {1},
  pages = {82-91},
}