Experimental investigation of the dielectric-semiconductor interface with scanning capacitance microscopy

J. Yang, J. J. Kopanski, A. Postula, M. Bialkowski. Experimental investigation of the dielectric-semiconductor interface with scanning capacitance microscopy. Microelectronics Reliability, 45(5-6):887-890, 2005. [doi]

@article{YangKPB05,
  title = {Experimental investigation of the dielectric-semiconductor interface with scanning capacitance microscopy},
  author = {J. Yang and J. J. Kopanski and A. Postula and M. Bialkowski},
  year = {2005},
  doi = {10.1016/j.microrel.2004.11.030},
  url = {http://dx.doi.org/10.1016/j.microrel.2004.11.030},
  researchr = {https://researchr.org/publication/YangKPB05},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Reliability},
  volume = {45},
  number = {5-6},
  pages = {887-890},
}