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An Effective Layout Decomposition Method for DSA with Multiple Patterning in Contact-Hole Generation

Yunfeng Yang, Wai-Shing Luk, Hai Zhou, David Z. Pan, Dian Zhou, Changhao Yan, Xuan Zeng 0001. An Effective Layout Decomposition Method for DSA with Multiple Patterning in Contact-Hole Generation. ACM Trans. Design Autom. Electr. Syst., 23(1), 2017. [doi]

Authors

Yunfeng Yang

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Wai-Shing Luk

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Hai Zhou

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David Z. Pan

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Dian Zhou

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Changhao Yan

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Xuan Zeng 0001

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