Yunfeng Yang, Wai-Shing Luk, Hai Zhou, David Z. Pan, Dian Zhou, Changhao Yan, Xuan Zeng 0001. An Effective Layout Decomposition Method for DSA with Multiple Patterning in Contact-Hole Generation. ACM Trans. Design Autom. Electr. Syst., 23(1), 2017. [doi]
@article{YangLZPZYZ17,
title = {An Effective Layout Decomposition Method for DSA with Multiple Patterning in Contact-Hole Generation},
author = {Yunfeng Yang and Wai-Shing Luk and Hai Zhou and David Z. Pan and Dian Zhou and Changhao Yan and Xuan Zeng 0001},
year = {2017},
doi = {10.1145/3131847},
url = {http://doi.acm.org/10.1145/3131847},
researchr = {https://researchr.org/publication/YangLZPZYZ17},
cites = {0},
citedby = {0},
journal = {ACM Trans. Design Autom. Electr. Syst.},
volume = {23},
number = {1},
}