Yunfeng Yang, Wai-Shing Luk, Hai Zhou, David Z. Pan, Dian Zhou, Changhao Yan, Xuan Zeng 0001. An Effective Layout Decomposition Method for DSA with Multiple Patterning in Contact-Hole Generation. ACM Trans. Design Autom. Electr. Syst., 23(1), 2017. [doi]
Abstract is missing.