GPU-Accelerated Inverse Lithography Towards High Quality Curvy Mask Generation

Haoyu Yang, Haoxing Ren. GPU-Accelerated Inverse Lithography Towards High Quality Curvy Mask Generation. In Gracieli Posser, Stephan Held, editors, Proceedings of the 2025 International Symposium on Physical Design, ISPD 2025, Austin, TX, USA, March 16-19, 2025. pages 42-50, ACM, 2025. [doi]

Abstract

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